Conformal doping of FINFET's: A fabrication and metrology challenge

W. Vandervorst; P. Eyben; M. Jurzack; B. Pawlak; R. Duffy

doi:10.1109/VTSA.2008.4530845

Conformal doping of FINFET's: A fabrication and metrology challenge

W. Vandervorst
, P. Eyben
, M. Jurzack
, B. Pawlak
, R. Duffy

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Original language	English
Title of host publication	2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	158
Number of pages	1
ISBN (Print)	9781424416158
DOIs	https://doi.org/10.1109/VTSA.2008.4530845
Publication status	Published - 2008
Externally published	Yes
Event	2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA - Hsinchu, Taiwan, Province of China Duration: 21 Apr 2008 → 23 Apr 2008

Publication series

Name	International Symposium on VLSI Technology, Systems, and Applications, Proceedings
ISSN (Print)	1930-8868

Conference

Conference	2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA
Country/Territory	Taiwan, Province of China
City	Hsinchu
Period	21/04/08 → 23/04/08

Access to Document

10.1109/VTSA.2008.4530845

Cite this

Vandervorst, W., Eyben, P., Jurzack, M., Pawlak, B., & Duffy, R. (2008). Conformal doping of FINFET's: A fabrication and metrology challenge. In 2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA (pp. 158). Article 4530845 (International Symposium on VLSI Technology, Systems, and Applications, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VTSA.2008.4530845

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title = "Conformal doping of FINFET's: A fabrication and metrology challenge",

author = "W. Vandervorst and P. Eyben and M. Jurzack and B. Pawlak and R. Duffy",

year = "2008",

doi = "10.1109/VTSA.2008.4530845",

language = "English",

isbn = "9781424416158",

series = "International Symposium on VLSI Technology, Systems, and Applications, Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA",

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note = "2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA ; Conference date: 21-04-2008 Through 23-04-2008",

}

Vandervorst, W, Eyben, P, Jurzack, M, Pawlak, B & Duffy, R 2008, Conformal doping of FINFET's: A fabrication and metrology challenge. in 2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA., 4530845, International Symposium on VLSI Technology, Systems, and Applications, Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 158, 2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA, Hsinchu, Taiwan, Province of China, 21/04/08. https://doi.org/10.1109/VTSA.2008.4530845

Conformal doping of FINFET's: A fabrication and metrology challenge. / Vandervorst, W.; Eyben, P.; Jurzack, M. et al.
2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA. Institute of Electrical and Electronics Engineers Inc., 2008. p. 158 4530845 (International Symposium on VLSI Technology, Systems, and Applications, Proceedings).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Conformal doping of FINFET's

T2 - 2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA

AU - Vandervorst, W.

AU - Eyben, P.

AU - Jurzack, M.

AU - Pawlak, B.

AU - Duffy, R.

PY - 2008

Y1 - 2008

UR - https://www.scopus.com/pages/publications/49049109244

U2 - 10.1109/VTSA.2008.4530845

DO - 10.1109/VTSA.2008.4530845

M3 - Conference proceeding

AN - SCOPUS:49049109244

SN - 9781424416158

T3 - International Symposium on VLSI Technology, Systems, and Applications, Proceedings

SP - 158

BT - 2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 21 April 2008 through 23 April 2008

ER -

Vandervorst W, Eyben P, Jurzack M, Pawlak B, Duffy R. Conformal doping of FINFET's: A fabrication and metrology challenge. In 2008 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA. Institute of Electrical and Electronics Engineers Inc. 2008. p. 158. 4530845. (International Symposium on VLSI Technology, Systems, and Applications, Proceedings). doi: 10.1109/VTSA.2008.4530845

Conformal doping of FINFET's: A fabrication and metrology challenge

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