Continuously variable W-band phase shifters based on MEMS-actuated conductive fingers

This paper presents four continuously variable W-band phase shifters in terms of design, fabrication, and radiofrequency (RF) characterization. They are based on low-loss ridge waveguide resonators tuned by electrostatically actuated highly conductive rigid fingers with measured variable deflection between 0.3° and 8.25° (at a control voltage of 0-27.5 V). A transmission-type phase shifter based on a tunable highly coupled resonator has been manufactured and measured. It shows a maximum figure of merit (FOM) of 19.5°/dB and a transmission phase variation of 70° at 98.4 GHz. The FOM and the transmission phase shift are increased to 55°/dB and 134°, respectively, by the effective coupling of two tunable resonances at the same device with a single tuning element. The FOM can be further improved for a tunable reflective-type phase shifter, consisting of a transmission-type phase shifter in series with a passive resonator and a waveguide short. Such a reflective-type phase shifter has been built and tested. It shows a maximum FOM of 101°/dB at 107.4 GHz. Here, the maximum phase shift varied between 0° and 377° for fingers deflections between 0.3° and 8.25°.