Abstract
It is shown that pyridine, when introduced into the gas phase, is effective in controlling the prereaction between the group II alkyl precursur and the group VI hydride during the metalorganic chemical vapour deposition (MOCVD) of ZnSe. During the corresponding growth of CdSe, pyridine induces a greatly reduced effect. Possible reaction mechanisms to account for prereaction control are proposed.
| Original language | English |
|---|---|
| Pages (from-to) | 525-533 |
| Number of pages | 9 |
| Journal | Journal of Crystal Growth |
| Volume | 108 |
| Issue number | 3-4 |
| DOIs | |
| Publication status | Published - 1 Feb 1991 |
| Externally published | Yes |
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