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Crack formation and development in AlGaN/GaN structures
P. J. Parbrook
, T. Wang
, M. A. Whitehead
, C. N. Harrison
, R. J. Lynch
, R. T. Murray
University of Sheffield
University of Liverpool
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Material Science
Film
100%
Crack Formation
100%
Density
100%
Nitride Compound
100%
Atomic Force Microscopy
100%
Vapor Phase Epitaxy
100%
Sapphire
100%
Lattice Mismatch
100%
Epilayers
100%
Microcracking
100%
Engineering
Crack Formation
100%
Critical Thickness
100%
Sapphire Substrate
50%
Nitride
50%
Tensiles
50%
Atomic Force Microscopy
50%
Lattice Mismatch
50%
Threading Dislocation
50%
Strained Layer
50%
Microcracking
50%