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Crack initiation and termination in III-V epitaxial layers

  • University of Liverpool
  • University of Sheffield

Research output: Contribution to journalArticlepeer-review

Abstract

Cracks in III-V epitaxial layers of cubic and hexagonal semiconductors have been studied to elucidate mechanisms of nucleation and termination. Pre-existing intersecting cracks and oval defects are very effective terminators. Cracks can be initiated at scribe marks and deep pits with clearly defined facets. However, for the majority of cracks propagated during the growth phase an additional nucleation feature which permits a crack to grow outwards in opposite directions is required but has not yet been observed.

Original languageEnglish
Pages (from-to)3077-3092
Number of pages16
JournalPhilosophical Magazine
Volume83
Issue number27
DOIs
Publication statusPublished - 21 Sept 2003
Externally publishedYes

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