Current understanding and modeling of B diffusion and activation anomalies in preamorphized ultra-shallow junctions
- B. Colombeau
- , A. J. Smith
- , N. E.B. Cowern
- , B. J. Pawlak
- , F. Cristiano
- , R. Duffy
- , A. Claverie
- , C. J. Ortiz
- , P. Pichler
- , E. Lampin
- , C. Zechner
- University of Surrey
- Koninklijke Philips N.V.
- CNRS
- CEMES-CNRS
- Fraunhofer Institute for Integrated Systems and Device Technology
- Institut supérieur de l'électronique et du numérique
- Synopsys Inc.
Research output: Contribution to journal › Article › peer-review