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Dark currents in pin photodetectors fabricated by preprocessing and postprocessing techniques of epitaxial liftoff

  • J. Justice
  • , B. Corbett
  • , S. Walsh
  • , L. Considine
  • , W. M. Kelly

Research output: Contribution to journalArticlepeer-review

Abstract

A comparison is made between the dark currents in mesa isolated InGaAs pin photodetectors. The detectors arc fabricated in three ways: on a substrate, by transfer of fabricated photodetectors onto a silicon substrate, and by fabrication of devices on posttransferred material. A 4 × 10 array of functioning devices is described.

Original languageEnglish
Pages (from-to)1382-1383
Number of pages2
JournalElectronics Letters
Volume31
Issue number16
DOIs
Publication statusPublished - 3 Aug 1995

Keywords

  • Epitaxial lift-off
  • pin photodiodes

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