Abstract
A comparison is made between the dark currents in mesa isolated InGaAs pin photodetectors. The detectors arc fabricated in three ways: on a substrate, by transfer of fabricated photodetectors onto a silicon substrate, and by fabrication of devices on posttransferred material. A 4 × 10 array of functioning devices is described.
| Original language | English |
|---|---|
| Pages (from-to) | 1382-1383 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 31 |
| Issue number | 16 |
| DOIs | |
| Publication status | Published - 3 Aug 1995 |
Keywords
- Epitaxial lift-off
- pin photodiodes
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