Defect evolution and C+/F+ Co-implantation in millisecond flash annealed ultra-shallow junctions

  • F. Cristiano
  • , E. M. Bazizi
  • , P. F. Fazzini
  • , S. Paul
  • , W. Lerch
  • , S. Boninelli
  • , R. Duffy
  • , A. Pakfar
  • , H. Bourdon
  • , F. Milesi

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

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