@inproceedings{b4eeeee375614a59a56cb464e20ccd2b,
title = "Defect passivation and dark count in Geiger-mode avalanche photodiodes",
abstract = "An experimental study of post metal anneal conditions on dark count in Geiger-mode avalanche photodiodes (GM-APD) has been performed. The GM-APD structure will be shown to be extremely sensitive to post-metal anneals. Dark counts from measured samples decreased by a factor of two for each separate anneal in forming gas using temperatures from 425°C to 450 °C. Conversely anneals of 250 °C in ambient increased dark count for temperature cycles up to 124 hours. Passivation and de-passivation of defect sites within the shallow junction active area are suspected as mechanisms contributing to the variations in dark count.",
keywords = "APD, Dark count, Geiger mode avalanche photodiodes, Passivation, Reliability, Single photon counting",
author = "Jackson, \{J. C.\} and G. Healy and Kelleher, \{A. M.\} and J. Alderman and J. Donnelly and Hurley, \{P. K.\} and Morrison, \{A. P.\} and A. Mathewson",
year = "2003",
doi = "10.1109/RELPHY.2003.1197818",
language = "English",
series = "IEEE International Reliability Physics Symposium Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "586--587",
booktitle = "2003 IEEE International Reliability Physics Symposium Proceedings, IRPS 2003 - 41st Annual",
address = "United States",
note = "2003 41st Annual IEEE International Reliability Physics Symposium, IRPS 2003 ; Conference date: 30-03-2003 Through 04-04-2003",
}