@inproceedings{54589aaecd814257b7e35c8769b370a1,
title = "Design and simulation of a 16-bit variable optical attenuator",
abstract = "Presents an initial design and simulation results of 16-bit variable optical attenuator (VOA) with chip dimensions of 4 × 4 μm2. Initial results indicate device-switching time is below 1 ms at a driving voltage of above 100 V. VOAs are widely used in optical communication and signal processing systems to attenuate light intensity between input and output optical ports. This VOA is currently under development and will be fabricated using SOI technology.",
author = "W. Sun and Mughal, \{M. J.\} and W. Noell and F. Perez and Riza, \{N. A.\} and \{De Rooij\}, N.",
note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",
year = "2002",
doi = "10.1109/OMEMS.2002.1031439",
language = "English",
series = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "53--54",
booktitle = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",
address = "United States",
}