Design and simulation of a springless micro switch

The design and simulation of an ultra low actuation voltage micromechanical systems (MEMS) switch is presented. A switch with no mechanical connection to the substrate and "zero" mechanical spring constant is developed. MEMS has two advantages such as enhanced RF performance and almost zero power consumption. However one major obstacle to the commercialization of MEMSs is the high voltage requirement to actuate the switch. The switching design is achieved by generating a pulling electrostatic force to overcome the gravitational force acting on the switching membrane. The designed electrostatic force equations do not consider the holes that reduce the overall damping of the switch. The equation of dynamic motion that govern the mechanical response of the MEMS is established. The "OFF state" fringing capacitance of RF MEMS shunt switches is also estimated. The variable damping model requires a longer switching time compared to the constant damping effect of the model.