@article{78e5acc46834439bbc62ba2fa6c7f06d,
title = "Design, modeling, fabrication, packaging and characterization of MEMS screech sensor",
keywords = "Capacitance, Multiphysics, Microelectromechanical systems, Sensitivity (control systems), Fabrication, Acoustics, Engineering, Instrumentation (computer programming), Thrust, Electronic engineering, Electrical engineering, Mechanical engineering, Materials science, Computer science, Finite element method, Optoelectronics, Physics, Electrode, Medicine, Alternative medicine, Structural engineering, Pathology, Quantum mechanics, Operating system",
author = "\{Sandeep Nagaraja\}, Veda",
year = "2022",
doi = "10.1016/j.matpr.2022.03.028",
language = "English",
journal = "Materials Today: Proceedings",
issn = "2214-7853",
publisher = "Elsevier Ltd",
}