Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer

Research output: Contribution to journalArticlepeer-review

Keywords

  • Accelerometer
  • Capacitive sensing
  • Microelectromechanical systems
  • Multiphysics
  • Sensitivity (control systems)
  • Displacement (psychology)
  • Capacitance
  • Acoustics
  • MATLAB
  • Computer science
  • Finite element method
  • Electronic engineering
  • Engineering
  • Electrical engineering
  • Materials science
  • Physics
  • Structural engineering
  • Optoelectronics
  • Psychology
  • Electrode
  • Quantum mechanics
  • Psychotherapist
  • Operating system

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