Design of four-dof compliant parallel manipulators considering maximum kinematic decoupling for fast steering mirrors

Laser beams can fluctuate in four directions, which requires active compensation by a fast steering mirror (FSM) motion system. This paper deals with the design of four-degrees-of-freedom (DoF) compliant parallel manipulators, for responding to the requirements of the FSM. In order to simplify high-precision control in parallel manipulators, maximum kinematic decoupling is always desired. A constraint map method is used to propose the four required DoF with the consideration of maximum kinematic decoupling. A specific compliant mechanism is presented based on the constraint map, and its kinematics is estimated analytically. Finite element analysis demonstrates the desired qualitative motion and provides some initial quantitative analysis. A normalization-based compliance matrix is finally derived to verify and demonstrate the mobility of the system clearly. In a case study, the results of normalization-based compliance matrix modelling show that the diagonal entries corresponding to the four DoF directions are about 10 times larger than those corresponding to the two-constraint directions, validating the desired mobility.