@inbook{81b395d11010493c9ba1a9d7e16597d6,
title = "Design Optimization of Fully Integrated, MEMS Electromagnetic Energy Harvesting Devices using Patterned Micro-magnet Arrays",
abstract = "One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.",
author = "D. Mallick and K. Paul and S. Roy",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 18th International Conference on Nanotechnology, NANO 2018 ; Conference date: 23-07-2018 Through 26-07-2018",
year = "2018",
month = jul,
day = "2",
doi = "10.1109/NANO.2018.8626365",
language = "English",
series = "Proceedings of the IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
booktitle = "18th International Conference on Nanotechnology, NANO 2018",
address = "United States",
}