TY - GEN
T1 - Design Optimization of Fully Integrated, MEMS Electromagnetic Energy Harvesting Devices using Patterned Micro-magnet Arrays
AU - Mallick, D.
AU - Paul, K.
AU - Roy, S.
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/7/2
Y1 - 2018/7/2
N2 - One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.
AB - One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.
UR - https://www.scopus.com/pages/publications/85062299290
U2 - 10.1109/NANO.2018.8626365
DO - 10.1109/NANO.2018.8626365
M3 - Conference proceeding
AN - SCOPUS:85062299290
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 18th International Conference on Nanotechnology, NANO 2018
PB - IEEE Computer Society
T2 - 18th International Conference on Nanotechnology, NANO 2018
Y2 - 23 July 2018 through 26 July 2018
ER -