Design Optimization of Fully Integrated, MEMS Electromagnetic Energy Harvesting Devices using Patterned Micro-magnet Arrays

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.

Original languageEnglish
Title of host publication18th International Conference on Nanotechnology, NANO 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538653364
DOIs
Publication statusPublished - 2 Jul 2018
Event18th International Conference on Nanotechnology, NANO 2018 - Cork, Ireland
Duration: 23 Jul 201826 Jul 2018

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
Volume2018-July
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Conference

Conference18th International Conference on Nanotechnology, NANO 2018
Country/TerritoryIreland
CityCork
Period23/07/1826/07/18

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