Detection of diffused III-V materials in high-k oxides during atomic layer deposition and annealing

W Cabrera; H Dong; B Brennan; É O’Connor; P Carolan; R Galatage; S Monaghan; I Povey; PK Hurley; CL Hinkle; others

Detection of diffused III-V materials in high-k oxides during atomic layer deposition and annealing

W Cabrera
, H Dong
, B Brennan
, É O’Connor
, P Carolan
, R Galatage
, S Monaghan
, I Povey
, PK Hurley
, CL Hinkle
, others

Tyndall MicroNano Systems

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Meeting Abstracts
Publication status	Published - 2008

Cite this

@article{3ed903b3eb9944fcb3b99c1353f73519,

title = "Detection of diffused III-V materials in high-k oxides during atomic layer deposition and annealing",

author = "W Cabrera and H Dong and B Brennan and {\'E} O{\textquoteright}Connor and P Carolan and R Galatage and S Monaghan and I Povey and PK Hurley and CL Hinkle and others",

year = "2008",

language = "Undefined/Unknown",

journal = "Meeting Abstracts",

issn = "1091-8213",

}

TY - JOUR

T1 - Detection of diffused III-V materials in high-k oxides during atomic layer deposition and annealing

AU - Cabrera, W

AU - Dong, H

AU - Brennan, B

AU - O’Connor, É

AU - Carolan, P

AU - Galatage, R

AU - Monaghan, S

AU - Povey, I

AU - Hurley, PK

AU - Hinkle, CL

AU - others,

PY - 2008

Y1 - 2008

M3 - Article

SN - 1091-8213

JO - Meeting Abstracts

JF - Meeting Abstracts

ER -