@inbook{fd35a4017ceb409fa33a89fa426dfcff,
title = "Development and integration of micro-patterned, thick CoPtP permanent magnets for MEMS applications",
abstract = "CMOS compatible integration of permanent magnets with thickness of the order of microns to hundreds of microns is a key challenge for a number of magnetic MEMS applications such as mechanical energy harvesters [1-3].",
author = "D. Mallick and S. Roy",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 IEEE International Magnetics Conference, INTERMAG 2017 ; Conference date: 24-04-2017 Through 28-04-2017",
year = "2017",
month = aug,
day = "10",
doi = "10.1109/INTMAG.2017.8008062",
language = "English",
series = "2017 IEEE International Magnetics Conference, INTERMAG 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2017 IEEE International Magnetics Conference, INTERMAG 2017",
address = "United States",
}