Development and integration of micro-patterned, thick CoPtP permanent magnets for MEMS applications

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

CMOS compatible integration of permanent magnets with thickness of the order of microns to hundreds of microns is a key challenge for a number of magnetic MEMS applications such as mechanical energy harvesters [1-3].

Original languageEnglish
Title of host publication2017 IEEE International Magnetics Conference, INTERMAG 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538610862
DOIs
Publication statusPublished - 10 Aug 2017
Event2017 IEEE International Magnetics Conference, INTERMAG 2017 - Dublin, Ireland
Duration: 24 Apr 201728 Apr 2017

Publication series

Name2017 IEEE International Magnetics Conference, INTERMAG 2017

Conference

Conference2017 IEEE International Magnetics Conference, INTERMAG 2017
Country/TerritoryIreland
CityDublin
Period24/04/1728/04/17

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