Development and test of an integrated microsystem for HPLC separation and detection using refractive index measurements

In recent years optical waveguide sensors have been used for applications as biosensors and chemical sensors. Often the fluidic element of the sensor has a large working volume (μl) and full device integration is not undertaken. We look at a number of fabrication routes available to integrate microfluidic and optical detection components to achieve a fully integrated microsystem and highlight some of the technical issues arising in different integration strategies. Wafer and chip integration strategies using anodic, thin film and polymer bonding for the fluidic module and the optical sensor were investigated. The integrated microsystem was evaluated for fluidic and optical performance, integration showed no significant impact on performance of either component. The fluidic system presents a nanolitre detection volume offering reduced sample volumes in HPLC applications. Initial optical performance of the integrated structure was carried out using a refractive index measurement system, the Farfield Analight^®Bio250.