@misc{e76176871ad54e6e8d755cc9e3313131,
title = "Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors",
abstract = "Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.",
keywords = "Corona poling, Micromachining, Pyroelectric array",
author = "Christopher Shaw and Spartaco Landi and Roger Whatmore and Paul Kirby",
year = "2004",
doi = "10.1080/10584580490458775",
language = "English",
volume = "63",
series = "Integrated Ferroelectrics",
publisher = "Taylor and Francis Ltd.",
type = "Other",
}
