Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors

Christopher Shaw; Spartaco Landi; Roger Whatmore; Paul Kirby

doi:10.1080/10584580490458775

Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors

Christopher Shaw
, Spartaco Landi
, Roger Whatmore
, Paul Kirby

Tyndall Micronano Electronics

Research output: Other output › peer-review

Abstract

Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.

Original language	English
Number of pages	5
Volume	63
DOIs	https://doi.org/10.1080/10584580490458775
Publication status	Published - 2004

Publication series

Name	Integrated Ferroelectrics
Publisher	Taylor and Francis Ltd.
ISSN (Print)	1058-4587

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Corona poling
Micromachining
Pyroelectric array

Access to Document

10.1080/10584580490458775

Cite this

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abstract = "Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.",

keywords = "Corona poling, Micromachining, Pyroelectric array",

author = "Christopher Shaw and Spartaco Landi and Roger Whatmore and Paul Kirby",

year = "2004",

doi = "10.1080/10584580490458775",

language = "English",

volume = "63",

series = "Integrated Ferroelectrics",

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T1 - Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors

AU - Shaw, Christopher

AU - Landi, Spartaco

AU - Whatmore, Roger

AU - Kirby, Paul

PY - 2004

Y1 - 2004

N2 - Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.

AB - Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.

KW - Corona poling

KW - Micromachining

KW - Pyroelectric array

UR - https://www.scopus.com/pages/publications/23044451644

U2 - 10.1080/10584580490458775

DO - 10.1080/10584580490458775

M3 - Other output

AN - SCOPUS:23044451644

VL - 63

T3 - Integrated Ferroelectrics

ER -

Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors

Abstract

Publication series

UN SDGs

Keywords

Access to Document

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