Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors

K. Moustakas; R. Bates; C. Buttar; M. Dalla; T. Hemperek; J. W. Van Hoorne; T. Kugathasan; D. Maneuski; C. A.Marin Tobon; L. Musa; H. Pernegger; P. Riedler; C. Riegel; C. Sbarra; D. M. Schaefer; A. Sharma; E. J. Schioppa; W. Snoeys; C. Solans Sanchez; T. Wang; N. Wermes

doi:10.1109/NSSMIC.2017.8533114

Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors

K. Moustakas
, R. Bates
, C. Buttar
, M. Dalla
, T. Hemperek
, J. W. Van Hoorne
, T. Kugathasan
, D. Maneuski
, C. A.Marin Tobon
, L. Musa
, H. Pernegger
, P. Riedler
, C. Riegel
, C. Sbarra
, D. M. Schaefer
, A. Sharma
, E. J. Schioppa
, W. Snoeys
, C. Solans Sanchez
, T. Wang

N. Wermes

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

Recent advancements in CMOS technologies enable Depleted Monolithic Active Pixel Sensor (DMAPS) realizations by exploiting high resistivity and/or high voltage biasing to deplete a large active sensing volume. DMAPS have emerged as a promising alternative for particle detection in high energy physics due to their low cost, reduced manufacturing complexity and high granularity. In the framework of the ALICE Inner Tracking System (ITS) upgrade, prototype sensors have been designed and characterized in the TowerJazz 180nm standard CMOS imaging process and in a novel modification of this process to achieve full depletion. Measurement results demonstrate that the sensors manufactured using the modified process are fully functional even after a dose of 1015neq/cm2, which is the expected NIEL of the outer layers of the ATLAS Inner Tracker (ITk) during the future High Luminosity Large Hardon Collider (HL-LHC) operation. Based on these encouraging results, two highly granular, low power DMAPS chips with different readout architectures have been designed and are being proposed for the ATLAS ITk upgrade.

Original language	English
Title of host publication	2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538622827
DOIs	https://doi.org/10.1109/NSSMIC.2017.8533114
Publication status	Published - 12 Nov 2018
Externally published	Yes
Event	2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Atlanta, United States Duration: 21 Oct 2017 → 28 Oct 2017

Publication series

Name	2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings

Conference

Conference	2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017
Country/Territory	United States
City	Atlanta
Period	21/10/17 → 28/10/17

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1109/NSSMIC.2017.8533114

Cite this

Moustakas, K., Bates, R., Buttar, C., Dalla, M., Hemperek, T., Van Hoorne, J. W., Kugathasan, T., Maneuski, D., Tobon, C. A. M., Musa, L., Pernegger, H., Riedler, P., Riegel, C., Sbarra, C., Schaefer, D. M., Sharma, A., Schioppa, E. J., Snoeys, W., Sanchez, C. S., ... Wermes, N. (2018). Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors. In 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings Article 8533114 (2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NSSMIC.2017.8533114

Moustakas, K. ; Bates, R. ; Buttar, C. et al. / Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors. 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. (2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings).

@inproceedings{7db883806f144ce5800fc0f5d5bf02e4,

title = "Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors",

abstract = "Recent advancements in CMOS technologies enable Depleted Monolithic Active Pixel Sensor (DMAPS) realizations by exploiting high resistivity and/or high voltage biasing to deplete a large active sensing volume. DMAPS have emerged as a promising alternative for particle detection in high energy physics due to their low cost, reduced manufacturing complexity and high granularity. In the framework of the ALICE Inner Tracking System (ITS) upgrade, prototype sensors have been designed and characterized in the TowerJazz 180nm standard CMOS imaging process and in a novel modification of this process to achieve full depletion. Measurement results demonstrate that the sensors manufactured using the modified process are fully functional even after a dose of 1015neq/cm2, which is the expected NIEL of the outer layers of the ATLAS Inner Tracker (ITk) during the future High Luminosity Large Hardon Collider (HL-LHC) operation. Based on these encouraging results, two highly granular, low power DMAPS chips with different readout architectures have been designed and are being proposed for the ATLAS ITk upgrade.",

author = "K. Moustakas and R. Bates and C. Buttar and M. Dalla and T. Hemperek and \{Van Hoorne\}, \{J. W.\} and T. Kugathasan and D. Maneuski and Tobon, \{C. A.Marin\} and L. Musa and H. Pernegger and P. Riedler and C. Riegel and C. Sbarra and Schaefer, \{D. M.\} and A. Sharma and Schioppa, \{E. J.\} and W. Snoeys and Sanchez, \{C. Solans\} and T. Wang and N. Wermes",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 ; Conference date: 21-10-2017 Through 28-10-2017",

year = "2018",

month = nov,

day = "12",

doi = "10.1109/NSSMIC.2017.8533114",

language = "English",

series = "2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings",

address = "United States",

}

Moustakas, K, Bates, R, Buttar, C, Dalla, M, Hemperek, T, Van Hoorne, JW, Kugathasan, T, Maneuski, D, Tobon, CAM, Musa, L, Pernegger, H, Riedler, P, Riegel, C, Sbarra, C, Schaefer, DM, Sharma, A, Schioppa, EJ, Snoeys, W, Sanchez, CS, Wang, T & Wermes, N 2018, Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors. in 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings., 8533114, 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings, Institute of Electrical and Electronics Engineers Inc., 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017, Atlanta, United States, 21/10/17. https://doi.org/10.1109/NSSMIC.2017.8533114

Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors. / Moustakas, K.; Bates, R.; Buttar, C. et al.
2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. 8533114 (2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors

AU - Moustakas, K.

AU - Bates, R.

AU - Buttar, C.

AU - Dalla, M.

AU - Hemperek, T.

AU - Van Hoorne, J. W.

AU - Kugathasan, T.

AU - Maneuski, D.

AU - Tobon, C. A.Marin

AU - Musa, L.

AU - Pernegger, H.

AU - Riedler, P.

AU - Riegel, C.

AU - Sbarra, C.

AU - Schaefer, D. M.

AU - Sharma, A.

AU - Schioppa, E. J.

AU - Snoeys, W.

AU - Sanchez, C. Solans

AU - Wang, T.

AU - Wermes, N.

PY - 2018/11/12

Y1 - 2018/11/12

N2 - Recent advancements in CMOS technologies enable Depleted Monolithic Active Pixel Sensor (DMAPS) realizations by exploiting high resistivity and/or high voltage biasing to deplete a large active sensing volume. DMAPS have emerged as a promising alternative for particle detection in high energy physics due to their low cost, reduced manufacturing complexity and high granularity. In the framework of the ALICE Inner Tracking System (ITS) upgrade, prototype sensors have been designed and characterized in the TowerJazz 180nm standard CMOS imaging process and in a novel modification of this process to achieve full depletion. Measurement results demonstrate that the sensors manufactured using the modified process are fully functional even after a dose of 1015neq/cm2, which is the expected NIEL of the outer layers of the ATLAS Inner Tracker (ITk) during the future High Luminosity Large Hardon Collider (HL-LHC) operation. Based on these encouraging results, two highly granular, low power DMAPS chips with different readout architectures have been designed and are being proposed for the ATLAS ITk upgrade.

AB - Recent advancements in CMOS technologies enable Depleted Monolithic Active Pixel Sensor (DMAPS) realizations by exploiting high resistivity and/or high voltage biasing to deplete a large active sensing volume. DMAPS have emerged as a promising alternative for particle detection in high energy physics due to their low cost, reduced manufacturing complexity and high granularity. In the framework of the ALICE Inner Tracking System (ITS) upgrade, prototype sensors have been designed and characterized in the TowerJazz 180nm standard CMOS imaging process and in a novel modification of this process to achieve full depletion. Measurement results demonstrate that the sensors manufactured using the modified process are fully functional even after a dose of 1015neq/cm2, which is the expected NIEL of the outer layers of the ATLAS Inner Tracker (ITk) during the future High Luminosity Large Hardon Collider (HL-LHC) operation. Based on these encouraging results, two highly granular, low power DMAPS chips with different readout architectures have been designed and are being proposed for the ATLAS ITk upgrade.

UR - https://www.scopus.com/pages/publications/85058441958

U2 - 10.1109/NSSMIC.2017.8533114

DO - 10.1109/NSSMIC.2017.8533114

M3 - Conference proceeding

AN - SCOPUS:85058441958

T3 - 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings

BT - 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017

Y2 - 21 October 2017 through 28 October 2017

ER -

Moustakas K, Bates R, Buttar C, Dalla M, Hemperek T, Van Hoorne JW et al. Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors. In 2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc. 2018. 8533114. (2017 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2017 - Conference Proceedings). doi: 10.1109/NSSMIC.2017.8533114

Development in a Novel CMOS Process for Depleted Monolithic Active Pixel Sensors

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