Development of a titanium plasma etch process for uncooled titanium nanobolometer fabrication
- Stephen F. Gilmartin
- , Khalil Arshak
- , Dave Bain
- , William A. Lane
- , Damian Collins
- , Arousian Arshak
- , Brendan McCarthy
- , Simon B. Newcomb
- , Michelle Walsh
Research output: Contribution to journal › Article › peer-review