Development of a tungsten plasma etch process for IR nanobolometer fabrication

  • Stephen F. Gilmartin
  • , Khalil Arshak
  • , Dave Bain
  • , William A. Lane
  • , Brendan McCarthy
  • , Damian Collins
  • , Simon B. Newcomb
  • , Arousian Arshak

Research output: Contribution to journal › Article › peer-review

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