Development of behavioural models for mechanically loaded microcantilevers and beams

From a modelling viewpoint MEMS are very complex structures. The development of full mathematical models is an extremely challenging problem. Some of the methods, assumptions and simplifications commonly used when modelling macroengineering structures may not be applied to real MEMS. Furthermore applying well-known behavioural models developed for macrostructures to microdevices has proved to be questionable if not inappropriate. Thus alternative approaches need to be used and new models need to be developed. This paper presents mathematical models of mechanical behaviour of micromachined cantilevers and beams on supports under uniform or concentrated load. The models were extracted from finite element simulation data using dimensional analysis.