Abstract
This paper presents a review of recent developments in Europe in the area of microsystems-related activities (referred to by the acronym, MST in Europe). In particular it focuses on the replacement of passive components by devices fabricated using MST techniques. MST replacements for switches and magnetic components are discussed in detail. The emerging area of MOEMS or optical MEMS is also introduced. The paper also addresses MST packaging in the context of the traditional electronic packaging community who will in the future, have to address the integration and assembly of MST components and sub-systems into new product development programmes.
| Original language | English |
|---|---|
| Pages (from-to) | 98-103 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4217 |
| Publication status | Published - 2002 |
| Event | 2000 HD International Conference on High-Density Interconnect and Systems Packaging - Denver, CO, United States Duration: 25 Apr 2000 → 28 Apr 2000 |
Keywords
- Electronics
- MEMS
- Microswitch
- Microsystems
- MST
- NEXUS
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