@inproceedings{1ba235e04a6742fd801642895b416aaa,
title = "Dielectric characterization for novel high-k thin films using microwave techniques",
abstract = "This paper addresses the issue of novel high-k material thin film characterization through wafer-probe measurements and electromagnetic simulation (EM) of coplanar waveguides. The dielectric constant of an alumina substrate has been successfully extracted from s-parameter measurements of a coplanar waveguide. Verification lines on the impedance standard substrate (ISS) substrates have been used as a method to test a dielectric constant extraction technique and also to test the accuracy of EM simulations. The characteristic impedance and the effective dielectric constant for CPW are predicted using electromagnetic simulation.",
keywords = "Coplanar waveguide (CPW), Dielectric characterization, Microwave measurements, Thin film",
author = "Wenbin Chen and O'Sullivan, \{J. A.\} and McCarthy, \{K. G.\}",
year = "2008",
doi = "10.1049/cp:20080884",
language = "English",
isbn = "9780863419218",
series = "IET Conference Publications",
number = "544 CP",
pages = "631--634",
booktitle = "China-Ireland International Conference on Information and Communications Technologies, CIICT 2008",
edition = "544 CP",
note = "China-Ireland International Conference on Information and Communications Technologies, CIICT 2008 ; Conference date: 26-09-2008 Through 28-09-2008",
}