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Dielectric-free fabrication of compact 30-GHz photodetectors using the isolated pedestal contact configuration

Research output: Contribution to journalArticlepeer-review

Abstract

We demonstrate a rapid fabrication process for high-speed waveguide-based photodetectors operating above 30 GHz. The process requires no dielectric planarization, and forms planar ground-signal-ground (GSG) contacts, which is more robust and ideally suitable for flip-chip packaging.

Original languageEnglish
Article number6180186
Pages (from-to)1082-1084
Number of pages3
JournalIEEE Photonics Technology Letters
Volume24
Issue number13
DOIs
Publication statusPublished - 2012

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Keywords

  • Optical device fabrication
  • photodetectors
  • photodiodes

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