Abstract
We demonstrate a rapid fabrication process for high-speed waveguide-based photodetectors operating above 30 GHz. The process requires no dielectric planarization, and forms planar ground-signal-ground (GSG) contacts, which is more robust and ideally suitable for flip-chip packaging.
| Original language | English |
|---|---|
| Article number | 6180186 |
| Pages (from-to) | 1082-1084 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 24 |
| Issue number | 13 |
| DOIs | |
| Publication status | Published - 2012 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
Keywords
- Optical device fabrication
- photodetectors
- photodiodes
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