Diffusion, activation, and regrowth behavior of high dose P implants in Ge

  • A. Satta
  • , E. Simoen
  • , R. Duffy
  • , T. Janssens
  • , T. Clarysse
  • , A. Benedetti
  • , M. Meuris
  • , W. Vandervorst

Research output: Contribution to journal › Article › peer-review

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