Dimethylamine Borane Oxidation for Electroless Deposition from Alkaline Solutions

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

Dimethylamine borane (DMAB) has been used as a reducing agent in electroless baths for many years. There has been an increased interest in DMAB-based electroless baths recently for applications in microelectronics such as barrier/capping layers for copper IC interconnect. To optimise the plating baths a thorough understanding of the role of each of the bath constituents is required. To this end we have employed microelectrodes to investigate the oxidation mechanism of boranes in alkaline solutions. In this paper we present data for DMAB and the simpler ammonia borane (AB) to assist in the analysis of borane oxidation in alkaline solutions. Both DMAB and AB are shown to oxidise in two steady state mass transport-controlled oxidation waves for specific concentration ranges. The potential range for oxidation, the optimum concentration and a suggested mechanism for oxidation are shown. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationScience, Technology, and Tools for Electroceposition
Subtitle of host publicationFrom Lab to Factory
PublisherElectrochemical Society Inc.
Pages1-9
Number of pages9
Edition31
ISBN (Electronic)9781566774833
DOIs
Publication statusPublished - 2006
EventScience, Technology, and Tools for Electrodeposition: from Lab to Factory - 208th Electrochemical Society Meeting - Los Angeles, CA, United States
Duration: 16 Oct 200521 Oct 2005

Publication series

NameECS Transactions
Number31
Volume1
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceScience, Technology, and Tools for Electrodeposition: from Lab to Factory - 208th Electrochemical Society Meeting
Country/TerritoryUnited States
CityLos Angeles, CA
Period16/10/0521/10/05

Fingerprint

Dive into the research topics of 'Dimethylamine Borane Oxidation for Electroless Deposition from Alkaline Solutions'. Together they form a unique fingerprint.

Cite this