@misc{cdf2c13c9db449b296ebc4b7a5bf38bb,
title = "Direct patterning of photosensitive chemical solution deposition PZT layers",
abstract = "A highly concentrated solution for producing photopatternable layers of lead zirconate titanate (PZT) was prepared by dissolving into acrylic acid an amorphous PZT powder which was obtained by a sol-gel process. The solution was found to be suitable for spin-coating PZT layers that are photosensitive to UV radiation. After deposition and subsequent exposure the PZT film showed a decreased solubility in several organic compounds. These properties were exploited to create features on platinised silicon (Si) substrates. A thermogravimetric analysis was performed on the solution to determine the best thermal profile for the burn out of the organics. PZT features up to 2 μm thick were obtained after the firing process.",
keywords = "Drying, Films, Photopatterning, PZT, Sol-gel process",
author = "S. Marson and Dorey, \{R. A.\} and Q. Zhang and Whatmore, \{R. W.\} and A. Hardy and J. Mullens",
year = "2004",
month = jun,
doi = "10.1016/S0955-2219(03)00543-0",
language = "English",
volume = "24",
series = "Journal of the European Ceramic Society",
publisher = "Elsevier B.V.",
edition = "6",
type = "Other",
}