Doping of sub-50nm SOI layers
- Bartek J. Pawlak
- , Ray Duffy
- , Mark Van Dal
- , Frans Voogt
- , Robbert Weemaes
- , Fred Roozeboom
- , Peer Zalm
- , Nick Bennett
- , Nick Cowern
- NXP-TSMC Research Center
- NXP Semiconductors
- Newcastle University
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review