E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	165
Number of pages	1
Journal	Materials Science in Semiconductor Processing
Volume	42
DOIs	https://doi.org/10.1016/j.mssp.2015.11.019
Publication status	Published - 1 Feb 2016

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@article{038d7c7eb69f4282b3ed3d0761aef1bc,

title = "E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices",

author = "Enrico Napolitani and Ray Duffy and Nikolas Zographos and \{Van Dal\}, Mark",

year = "2016",

month = feb,

day = "1",

doi = "10.1016/j.mssp.2015.11.019",

language = "English",

volume = "42",

pages = "165",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier Ltd",

}

TY - JOUR

T1 - E-MRS Spring Meeting 2015 Symposium Z

T2 - Nanomaterials and processes for advanced semiconductor CMOS devices

AU - Napolitani, Enrico

AU - Duffy, Ray

AU - Zographos, Nikolas

AU - Van Dal, Mark

PY - 2016/2/1

Y1 - 2016/2/1

UR - https://www.scopus.com/pages/publications/84975687727

U2 - 10.1016/j.mssp.2015.11.019

DO - 10.1016/j.mssp.2015.11.019

M3 - Editorial

AN - SCOPUS:84975687727

SN - 1369-8001

VL - 42

SP - 165

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

ER -