Edge supported ZnO thin film bulk acoustic wave resonators and filter design

Q. X. Su; P. B. Kirby; E. Komuro; R. W. Whatmore

doi:10.1109/FREQ.2000.887396

Edge supported ZnO thin film bulk acoustic wave resonators and filter design

Q. X. Su
, P. B. Kirby
, E. Komuro
, R. W. Whatmore

Research output: Contribution to journal › Article › peer-review

Abstract

Edge supported ZnO thin film bulk acoustic wave resonators of different areas were fabricated using both Al and Au/Cr electrodes and their high frequency response characteristic characterized by S-parameters measurement. The development of an equivalent circuit for the composite resonator lead to an understanding of the dependency on device area and electrode material. The use of varying resonator area in ladder filter design is discussed.

Original language	English
Pages (from-to)	434-440
Number of pages	7
Journal	Proceedings of the Annual IEEE International Frequency Control Symposium
DOIs	https://doi.org/10.1109/FREQ.2000.887396
Publication status	Published - 2000
Externally published	Yes

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title = "Edge supported ZnO thin film bulk acoustic wave resonators and filter design",

abstract = "Edge supported ZnO thin film bulk acoustic wave resonators of different areas were fabricated using both Al and Au/Cr electrodes and their high frequency response characteristic characterized by S-parameters measurement. The development of an equivalent circuit for the composite resonator lead to an understanding of the dependency on device area and electrode material. The use of varying resonator area in ladder filter design is discussed.",

author = "Su, \{Q. X.\} and Kirby, \{P. B.\} and E. Komuro and Whatmore, \{R. W.\}",

year = "2000",

doi = "10.1109/FREQ.2000.887396",

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journal = "Proceedings of the Annual IEEE International Frequency Control Symposium",

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AU - Su, Q. X.

AU - Kirby, P. B.

AU - Komuro, E.

AU - Whatmore, R. W.

PY - 2000

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N2 - Edge supported ZnO thin film bulk acoustic wave resonators of different areas were fabricated using both Al and Au/Cr electrodes and their high frequency response characteristic characterized by S-parameters measurement. The development of an equivalent circuit for the composite resonator lead to an understanding of the dependency on device area and electrode material. The use of varying resonator area in ladder filter design is discussed.

AB - Edge supported ZnO thin film bulk acoustic wave resonators of different areas were fabricated using both Al and Au/Cr electrodes and their high frequency response characteristic characterized by S-parameters measurement. The development of an equivalent circuit for the composite resonator lead to an understanding of the dependency on device area and electrode material. The use of varying resonator area in ladder filter design is discussed.

UR - https://www.scopus.com/pages/publications/0034447449

U2 - 10.1109/FREQ.2000.887396

DO - 10.1109/FREQ.2000.887396

M3 - Article

AN - SCOPUS:0034447449

SN - 0161-6404

SP - 434

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JO - Proceedings of the Annual IEEE International Frequency Control Symposium

JF - Proceedings of the Annual IEEE International Frequency Control Symposium

ER -

Edge supported ZnO thin film bulk acoustic wave resonators and filter design

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