@inproceedings{c3df6cbca7c548d9aa373278a7bf4433,
title = "Effect of pre-amorphization and annealing on the performance of a silicon optical phase shifter",
abstract = "The effect of pre-amorphization and annealing on the silicon optical PN phase shifter performance is studied. It is observed that the absorption has a larger dependency on the process parameters compared to the phase shift.",
author = "Darpan Mishra and Manoranjan Minz and Sonkar, \{Ramesh Kumar\}",
note = "Publisher Copyright: {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author(s); 2020 Frontiers in Optics Conference, FiO 2020 ; Conference date: 14-09-2020 Through 17-09-2020",
year = "2020",
month = sep,
day = "14",
doi = "10.1364/FIO.2020.JTu1A.50",
language = "English",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Frontiers in Optics - Proceedings Frontiers in Optics / Laser Science, Part of Frontiers in Optics + Laser Science APS/DLS, FiO 2020",
address = "United States",
}