Effect of thermal annealing on the stiffness of an SU-8 torsional spring

Y. Li; S. Kühne; D. Psychogiou; C. Hierold

doi:10.1016/j.proeng.2012.09.367

Effect of thermal annealing on the stiffness of an SU-8 torsional spring

Y. Li
, S. Kühne
, D. Psychogiou
, C. Hierold

Swiss Federal Institute of Technology Zurich

Research output: Contribution to journal › Article › peer-review

Abstract

The effect of thermal annealing on the torsional and bending stiffness of a polymeric torsional spring is studied, by analyzing the static and dynamic behavior of an SU-8 spring attached to the bottom of a silicon comb-drive actuator. The results suggest that, after thermal annealing, the torsional stiffness has been reduced (16.7 %) while the bending stiffness has been increased, which is desirable for the operation of the spring. The phenomenon is explained by the influence of the bi-axial residual stress variation in the SU-8 spring.

Original language	English
Pages (from-to)	1199-1202
Number of pages	4
Journal	Procedia Engineering
Volume	47
DOIs	https://doi.org/10.1016/j.proeng.2012.09.367
Publication status	Published - 2012
Externally published	Yes
Event	26th European Conference on Solid-State Transducers, EUROSENSOR 2012 - Krakow, Poland Duration: 9 Sep 2012 → 12 Sep 2012

Keywords

Comb-drive actuators
Large deflection
Micromirror
SU-8

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10.1016/j.proeng.2012.09.367

Cite this

@article{fa34ec2bd35c471eaf5088de75b5c8c4,

title = "Effect of thermal annealing on the stiffness of an SU-8 torsional spring",

abstract = "The effect of thermal annealing on the torsional and bending stiffness of a polymeric torsional spring is studied, by analyzing the static and dynamic behavior of an SU-8 spring attached to the bottom of a silicon comb-drive actuator. The results suggest that, after thermal annealing, the torsional stiffness has been reduced (16.7 \%) while the bending stiffness has been increased, which is desirable for the operation of the spring. The phenomenon is explained by the influence of the bi-axial residual stress variation in the SU-8 spring.",

keywords = "Comb-drive actuators, Large deflection, Micromirror, SU-8",

author = "Y. Li and S. K{\"u}hne and D. Psychogiou and C. Hierold",

year = "2012",

doi = "10.1016/j.proeng.2012.09.367",

language = "English",

volume = "47",

pages = "1199--1202",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier Ltd",

note = "26th European Conference on Solid-State Transducers, EUROSENSOR 2012 ; Conference date: 09-09-2012 Through 12-09-2012",

}

TY - JOUR

T1 - Effect of thermal annealing on the stiffness of an SU-8 torsional spring

AU - Li, Y.

AU - Kühne, S.

AU - Psychogiou, D.

AU - Hierold, C.

PY - 2012

Y1 - 2012

N2 - The effect of thermal annealing on the torsional and bending stiffness of a polymeric torsional spring is studied, by analyzing the static and dynamic behavior of an SU-8 spring attached to the bottom of a silicon comb-drive actuator. The results suggest that, after thermal annealing, the torsional stiffness has been reduced (16.7 %) while the bending stiffness has been increased, which is desirable for the operation of the spring. The phenomenon is explained by the influence of the bi-axial residual stress variation in the SU-8 spring.

AB - The effect of thermal annealing on the torsional and bending stiffness of a polymeric torsional spring is studied, by analyzing the static and dynamic behavior of an SU-8 spring attached to the bottom of a silicon comb-drive actuator. The results suggest that, after thermal annealing, the torsional stiffness has been reduced (16.7 %) while the bending stiffness has been increased, which is desirable for the operation of the spring. The phenomenon is explained by the influence of the bi-axial residual stress variation in the SU-8 spring.

KW - Comb-drive actuators

KW - Large deflection

KW - Micromirror

KW - SU-8

UR - https://www.scopus.com/pages/publications/84880990664

U2 - 10.1016/j.proeng.2012.09.367

DO - 10.1016/j.proeng.2012.09.367

M3 - Article

AN - SCOPUS:84880990664

SN - 1877-7058

VL - 47

SP - 1199

EP - 1202

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 26th European Conference on Solid-State Transducers, EUROSENSOR 2012

Y2 - 9 September 2012 through 12 September 2012

ER -

Effect of thermal annealing on the stiffness of an SU-8 torsional spring

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Keywords

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