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Effects of Fowler-Nordheim stress on interface trap density and emission cross sections in n-MOSFET's studied by three-level charge pumping

  • Xiao Jie Yuan
  • , Mike Kivi
  • , Stephen Taylor
  • , Paul Hurley
  • IEEE
  • Chartered Semiconductor Manufacturing Ltd.
  • University of Liverpool

Research output: Contribution to journalArticlepeer-review

Abstract

High field Fowler-Nordheim (F-N) stress effects on interface-trap dencity and emission cross sections in n-MOSFKT's have been studied using three-levels charge pumping (3LCP). The results show that 3LCP is sensitive to changes in trap cross section as a function of energy in the bandgap. An asymmetric change in electron and hole emission cross sections following F-N tunnelling injection is found. The work also provides further insight into the influence of hot electrons on interface trap generation in MOSFKT's in both the upper and lower bandgap following electrical stress.

Original languageEnglish
Pages (from-to)239-241
Number of pages3
JournalIEEE Electron Device Letters
Volume17
Issue number5
DOIs
Publication statusPublished - May 1996

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