Effects of high-energy ion irradiation on the conduction characteristics of HfO2-based MOSFET devices

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

MOSFET devices with HfO2 gate oxides were irradiated with high-energy (120 MeV) Au ions. It was observed mat the irradiation can cause both little or severe damage to the structures under test We associate these effects with me soft and hard breakdown failure modes occurring in ultra-min oxides. In both cases mere is a large increment of me transistor off current. If the damage is not catastrophic a decrease of me transconductance and drain current characteristics can also be detected. This indicates that me transistor is still operational but with worst performance parameters.

Original languageEnglish
Title of host publicationMicroelectronics Technology and Devices, SBMicro 2010
PublisherElectrochemical Society Inc.
Pages327-332
Number of pages6
Edition1
ISBN (Electronic)9781607681694
ISBN (Print)9781566778190
DOIs
Publication statusPublished - 2010

Publication series

NameECS Transactions
Number1
Volume31
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

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