Electrical activity of extended defects in III-V semiconductors

  • E. Simoen
  • , P. C. Hsu
  • , Y. Mols
  • , B. Kunert
  • , R. Langer
  • , C. Merckling
  • , A. Alian
  • , N. Waldron
  • , G. Eneman
  • , N. Collaert
  • , M. Heyns
  • , C. Claeys

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

This paper gives an overview on the electrical activity of extended defects in III-V materials, combining different analysis methods, which are based on lifetime extraction from diode current-voltage characteristics and deep-level studies using Deep-Level Transient Spectroscopy (DLTS). To that purpose p+n junction diodes have been fabricated in Ino.53Gao.47As hetero-epitaxial layers on semi-insulating InP or GaAs substrates. By depositing a strained buffer layer, the Extended Defect Density (EDD) can be varied over several decades, enabling the study of the electrical impact in the same range. It will be shown that the generation and recombination (GR) lifetimes of the Ino.53Gao.47As layers become dominated by the EDs for densities above about 3×106 cm-2, whereby the dominant GR level moves closer to the mid gap position. This is supported by DLTS, showing the occurrence of specific electron traps for defective epi layers, which exhibit a capture behavior which is typical for extended defects.

Original languageEnglish
Title of host publicationSemiconductor Process Integration 11
EditorsJ. Murota, C. Claeys, H. Iwai, M. Tao, S. Deleonibus, A. Mai, K. Shiojima, Y. Cao
PublisherElectrochemical Society Inc.
Pages21-31
Number of pages11
Edition4
ISBN (Electronic)9781607688785
ISBN (Print)9781607688785
DOIs
Publication statusPublished - 2019
Externally publishedYes
Event11th Symposium on Semiconductor Process Integration - 236th ECS Meeting - Atlanta, United States
Duration: 13 Oct 201917 Oct 2019

Publication series

NameECS Transactions
Number4
Volume92
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

Conference11th Symposium on Semiconductor Process Integration - 236th ECS Meeting
Country/TerritoryUnited States
CityAtlanta
Period13/10/1917/10/19

Fingerprint

Dive into the research topics of 'Electrical activity of extended defects in III-V semiconductors'. Together they form a unique fingerprint.

Cite this