Electrical analysis of three-stage passivated In 0.53 Ga 0.47 As capacitors with varying HfO 2 thicknesses and incorporating an Al 2 O 3 interface control layer

Ailbe O'Manachain

doi:10.1116/1.3532826

Electrical analysis of three-stage passivated In 0.53 Ga 0.47 As capacitors with varying HfO 2 thicknesses and incorporating an Al 2 O 3 interface control layer

Ailbe O'Manachain

Tyndall MicroNano Systems

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOIs	https://doi.org/10.1116/1.3532826
Publication status	Published - 2011

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10.1116/1.3532826

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@article{25c6c40ea71f415195797865c66b2a3d,

title = "Electrical analysis of three-stage passivated In 0.53 Ga 0.47 As capacitors with varying HfO 2 thicknesses and incorporating an Al 2 O 3 interface control layer",

author = "Ailbe O'Manachain",

year = "2011",

doi = "10.1116/1.3532826",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena",

}

Electrical analysis of three-stage passivated In 0.53 Ga 0.47 As capacitors with varying HfO 2 thicknesses and incorporating an Al 2 O 3 interface control layer. / O'Manachain, Ailbe.
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2011.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Electrical analysis of three-stage passivated In 0.53 Ga 0.47 As capacitors with varying HfO 2 thicknesses and incorporating an Al 2 O 3 interface control layer

AU - O'Manachain, Ailbe

PY - 2011

Y1 - 2011

U2 - 10.1116/1.3532826

DO - 10.1116/1.3532826

M3 - Article

JO - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

JF - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

ER -