Electrical analysis of three-stage passivated In0. 53Ga0. 47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer

S Monaghan; A O’Mahony; K Cherkaoui; É O’Connor; IM Povey; MG Nolan; D O’Connell; ME Pemble; PK Hurley; G Provenzano; others

Electrical analysis of three-stage passivated In0. 53Ga0. 47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer

S Monaghan
, A O’Mahony
, K Cherkaoui
, É O’Connor
, IM Povey
, MG Nolan
, D O’Connell
, ME Pemble
, PK Hurley
, G Provenzano
, others

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology B
Publication status	Published - 2011

Cite this

@article{9e41797111ce4d088567bf01256e44ec,

title = "Electrical analysis of three-stage passivated In0. 53Ga0. 47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer",

author = "S Monaghan and A O{\textquoteright}Mahony and K Cherkaoui and {\'E} O{\textquoteright}Connor and IM Povey and MG Nolan and D O{\textquoteright}Connell and ME Pemble and PK Hurley and G Provenzano and others",

year = "2011",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology B",

}

TY - JOUR

T1 - Electrical analysis of three-stage passivated In0. 53Ga0. 47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer

AU - Monaghan, S

AU - O’Mahony, A

AU - Cherkaoui, K

AU - O’Connor, É

AU - Povey, IM

AU - Nolan, MG

AU - O’Connell, D

AU - Pemble, ME

AU - Hurley, PK

AU - Provenzano, G

AU - others,

PY - 2011

Y1 - 2011

M3 - Article

JO - Journal of Vacuum Science & Technology B

JF - Journal of Vacuum Science & Technology B

ER -