Electrical characterization of novel PMNT thin-films

Wenbin Chen; Kevin G. McCarthy; Mehmet Çopuroǧlu; Shane O'Brien; Richard Winfield; Alan Mathewson

doi:10.1109/ICMTS.2010.5466848

Electrical characterization of novel PMNT thin-films

Wenbin Chen
, Kevin G. McCarthy
, Mehmet Çopuroǧlu
, Shane O'Brien
, Richard Winfield
, Alan Mathewson

University College Cork

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

Abstract

This paper presents the systematic investigation by electrical characterization of PMNT (lead magnesium niobate - lead titanate, Pb(Mg _0.33Nb_0.67)_0.65Ti_0.35O₃) thin-films with different fabrication parameters. The PMNT thin-films are processed under different conditions including annealing at various temperatures. Capacitance-voltage (C-V), current-voltage (I-V), capacitance-frequency (C-F), dissipation factor-frequency (D-F) and complex impedance-frequency (Z-F) measurements are presented.

Original language	English
Title of host publication	2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings
Pages	98-101
Number of pages	4
DOIs	https://doi.org/10.1109/ICMTS.2010.5466848
Publication status	Published - 2010
Event	2010 International Conference on Microelectronic Test Structures, ICMTS 2010 - Hiroshima, Japan Duration: 22 Mar 2010 → 25 Mar 2010

Publication series

Name	IEEE International Conference on Microelectronic Test Structures

Conference

Conference	2010 International Conference on Microelectronic Test Structures, ICMTS 2010
Country/Territory	Japan
City	Hiroshima
Period	22/03/10 → 25/03/10

Keywords

Dielectric constant
Dielectric loss tangent
High-κ
PMNT
Thin-film

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10.1109/ICMTS.2010.5466848

Cite this

Chen, W., McCarthy, K. G., Çopuroǧlu, M., O'Brien, S., Winfield, R., & Mathewson, A. (2010). Electrical characterization of novel PMNT thin-films. In 2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings (pp. 98-101). Article 5466848 (IEEE International Conference on Microelectronic Test Structures). https://doi.org/10.1109/ICMTS.2010.5466848

@inbook{3362327f7cd24b09aa87e06b06a0d3ad,

title = "Electrical characterization of novel PMNT thin-films",

abstract = "This paper presents the systematic investigation by electrical characterization of PMNT (lead magnesium niobate - lead titanate, Pb(Mg 0.33Nb0.67)0.65Ti0.35O3) thin-films with different fabrication parameters. The PMNT thin-films are processed under different conditions including annealing at various temperatures. Capacitance-voltage (C-V), current-voltage (I-V), capacitance-frequency (C-F), dissipation factor-frequency (D-F) and complex impedance-frequency (Z-F) measurements are presented.",

keywords = "Dielectric constant, Dielectric loss tangent, High-κ, PMNT, Thin-film",

author = "Wenbin Chen and McCarthy, \{Kevin G.\} and Mehmet {\c C}opuroǧlu and Shane O'Brien and Richard Winfield and Alan Mathewson",

year = "2010",

doi = "10.1109/ICMTS.2010.5466848",

language = "English",

isbn = "9781424469154",

series = "IEEE International Conference on Microelectronic Test Structures",

pages = "98--101",

booktitle = "2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings",

note = "2010 International Conference on Microelectronic Test Structures, ICMTS 2010 ; Conference date: 22-03-2010 Through 25-03-2010",

}

Chen, W, McCarthy, KG, Çopuroǧlu, M, O'Brien, S, Winfield, R & Mathewson, A 2010, Electrical characterization of novel PMNT thin-films. in 2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings., 5466848, IEEE International Conference on Microelectronic Test Structures, pp. 98-101, 2010 International Conference on Microelectronic Test Structures, ICMTS 2010, Hiroshima, Japan, 22/03/10. https://doi.org/10.1109/ICMTS.2010.5466848

Electrical characterization of novel PMNT thin-films. / Chen, Wenbin; McCarthy, Kevin G.; Çopuroǧlu, Mehmet et al.
2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings. 2010. p. 98-101 5466848 (IEEE International Conference on Microelectronic Test Structures).

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

TY - CHAP

T1 - Electrical characterization of novel PMNT thin-films

AU - Chen, Wenbin

AU - McCarthy, Kevin G.

AU - Çopuroǧlu, Mehmet

AU - O'Brien, Shane

AU - Winfield, Richard

AU - Mathewson, Alan

PY - 2010

Y1 - 2010

N2 - This paper presents the systematic investigation by electrical characterization of PMNT (lead magnesium niobate - lead titanate, Pb(Mg 0.33Nb0.67)0.65Ti0.35O3) thin-films with different fabrication parameters. The PMNT thin-films are processed under different conditions including annealing at various temperatures. Capacitance-voltage (C-V), current-voltage (I-V), capacitance-frequency (C-F), dissipation factor-frequency (D-F) and complex impedance-frequency (Z-F) measurements are presented.

AB - This paper presents the systematic investigation by electrical characterization of PMNT (lead magnesium niobate - lead titanate, Pb(Mg 0.33Nb0.67)0.65Ti0.35O3) thin-films with different fabrication parameters. The PMNT thin-films are processed under different conditions including annealing at various temperatures. Capacitance-voltage (C-V), current-voltage (I-V), capacitance-frequency (C-F), dissipation factor-frequency (D-F) and complex impedance-frequency (Z-F) measurements are presented.

KW - Dielectric constant

KW - Dielectric loss tangent

KW - High-κ

KW - PMNT

KW - Thin-film

UR - https://www.scopus.com/pages/publications/77953901396

U2 - 10.1109/ICMTS.2010.5466848

DO - 10.1109/ICMTS.2010.5466848

M3 - Chapter

AN - SCOPUS:77953901396

SN - 9781424469154

T3 - IEEE International Conference on Microelectronic Test Structures

SP - 98

EP - 101

BT - 2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings

T2 - 2010 International Conference on Microelectronic Test Structures, ICMTS 2010

Y2 - 22 March 2010 through 25 March 2010

ER -

Electrical characterization of novel PMNT thin-films

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Keywords

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