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Dive into the research topics of 'Electrical Evaluation of Ion Implant, Liquid, and Gas Sources for Doping of Ultra-Thin Body SOI and Si Nanowire Structures'. Together they form a unique fingerprint.- Sort by
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Electrical Evaluation of Ion Implant, Liquid, and Gas Sources for Doping of Ultra-Thin Body SOI and Si Nanowire Structures
- John Machale
- , Fintan Meaney
- , Brendan Sheehan
- , Ray Duffy
- , Noel Kennedy
- , Brenda Long
Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review