Electrical Evaluation of Ion Implant, Liquid, and Gas Sources for Doping of Ultra-Thin Body SOI and Si Nanowire Structures
- John Machale
- , Fintan Meaney
- , Brendan Sheehan
- , Ray Duffy
- , Noel Kennedy
- , Brenda Long
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review