Electrical properties of LaLuO3/Si(100) structures prepared by molecular beam deposition

  • Y. Y. Gomeniuk
  • , Y. V. Gomeniuk
  • , A. N. Nazarov
  • , P. K. Hurley
  • , K. Cherkaoui
  • , S. Monaghan
  • , H. D.B. Gottlob
  • , M. Schmidt
  • , J. Schubert
  • , J. M.J. Lopes
  • , O. Engström

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

The paper presents the results of electrical characterization in the wide temperature range (120-320 K) of the interface and bulk properties of high-k LaLuO3 dielectric deposited by molecular beam deposition (MBD) on silicon substrate. The energy distribution of interface state density is presented and typical maxima of 1.2×1011 and 2.5×10 11 eV-1 cm-2 were found at about 0.25-0.3 eV from the silicon valence band. The charge carrier transport through the dielectric at the forward bias was found to occur via Poole-Frenkel mechanism, while variable range hopping conduction (Mott's law) controls the current at the reverse bias.

Original languageEnglish
Title of host publicationPhysics and Technology of High-k Materials 8
PublisherElectrochemical Society Inc.
Pages221-227
Number of pages7
Edition3
ISBN (Electronic)9781607681724
ISBN (Print)9781566778220
DOIs
Publication statusPublished - 2010

Publication series

NameECS Transactions
Number3
Volume33
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

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