Electrical properties of thermally oxidised porous silicon

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Abstract

Results obtained for thermally oxidized porous silicon MOS structures are presented. In particular, fixed oxide charge densities exhibited by the oxide and high field conduction data are presented. From high-frequency (1 MHz) capacitance/voltage plots the flatband voltages were determined for a range of oxide thicknesses. The current/voltage characteristics of a 2100-angstrom oxide, for both polarities of gate voltage, are shown. The plot demonstrates an asymmetry in conduction with a higher electron injection from the metal. Analysis of the corresponding Fowler-Nordheim plots, taking an effective mass of electron in the oxide of 0.5, yields barrier heights to electron emission of 1.4 eV and 2.7 eV, for injection for the metal and semiconductor, respectively. The barrier height for injection from the metal into the oxide was found to be consistently lower than the value of 3.15 eV expected for aluminum on thermally grown silicon dioxide.

Original languageEnglish
Title of host publication1991 IEEE International SOI Conference Proceedings
PublisherPubl by IEEE
Pages178-179
Number of pages2
ISBN (Print)0780301846
Publication statusPublished - 1992
Event1991 IEEE International SOI Conference - Vail Valley, CO, USA
Duration: 1 Oct 19913 Oct 1991

Publication series

Name1991 IEEE International SOI Conference Proceedings

Conference

Conference1991 IEEE International SOI Conference
CityVail Valley, CO, USA
Period1/10/913/10/91

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