Electrical, structural, and chemical properties of HfO 2 films formed by electron beam evaporation

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@article{68cec21cc3be4337bbdb3d06a42cebca,

title = "Electrical, structural, and chemical properties of HfO 2 films formed by electron beam evaporation",

author = "Ailbe O'Manachain",

year = "2008",

doi = "10.1063/1.2978209",

language = "Undefined/Unknown",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}