@article{5cbb2835f7dd4d8086b53d55620f8649,
title = "Electrochemical Properties of Cu Deposition from Methanesulfonate Electrolytes for ULSI and MEMS Applications.",
keywords = "Electrochemistry, Electrolyte, Deposition (geology), Microelectromechanical systems, Materials science, Nanotechnology, Chemical engineering, Chemistry, Electrode, Engineering, Physical chemistry, Paleontology, Sediment, Biology",
author = "Casey, \{Declan P.\}",
year = "2009",
doi = "10.1149/ma2009-01/24/980",
language = "English",
journal = "Meeting Abstracts",
issn = "1091-8213",
}