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Electroless cobalt deposition from ammonia borane solutions

  • University College Cork

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

Ammonia borane (AB) has been used as a reducing agent in the deposition of cobalt on copper substrates. The bath composition for selective deposition were investigated. The mobile ion free plating bath was pH balanced and buffered using tetramethyl ammonium hydroxide. The codeposition of W with the Co was achieved utilising tungstic acid. The electrochemical analysis of the cobalt deposition and AB oxidation at the operating pH of 9 indicate that the AB oxidation on copper is faster than that on cobalt and that the reaction rate decreases as the deposition proceeds. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationElectrochemical Processing in ULSI and MEMS 2
PublisherElectrochemical Society Inc.
Pages51-59
Number of pages9
Edition6
ISBN (Print)9781566775175
DOIs
Publication statusPublished - 2006
Event209th ECS Meeting - Denver, CO, United States
Duration: 7 May 200611 May 2006

Publication series

NameECS Transactions
Number6
Volume2
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference209th ECS Meeting
Country/TerritoryUnited States
CityDenver, CO
Period7/05/0611/05/06

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