Epitaxy of III-V based channels on Si and transistor integration for 12-10nm node CMOS
- Matty Caymax
- , Clement Merckling
- , Gang Wang
- , Tommaso Orzali
- , Guo Weiming Guo
- , Wilfried Vandervorst
- , Johan Dekoster
- , Niamh Waldron
- , Aaron Thean
Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review