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Epitaxy of III-V based channels on Si and transistor integration for 12-10nm node CMOS

  • Matty Caymax
  • , Clement Merckling
  • , Gang Wang
  • , Tommaso Orzali
  • , Guo Weiming Guo
  • , Wilfried Vandervorst
  • , Johan Dekoster
  • , Niamh Waldron
  • , Aaron Thean
  • Interuniversitair Micro-Elektronica Centrum
  • MEMC Electronic Materials, Inc
  • Aixtron SE
  • KU Leuven

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

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