Equivalent oxide thickness correction in the high-k/In 0.53Ga0.47As/InP system

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Abstract

In this work we present the results of a combined experimental and theoretical investigation into the capacitance-voltage characteristics of the high-k/In0.53Ga0.47As/InP system. The emphasis of the work is placed on the maximum measured and theoretical capacitance for n and p doped In0.53Ga0.47As epitaxial layers in high-k/In 0.53Ga0.47As/InP MOS structures. Theoretical calculations based on ideal systems indicate a highly asymmetric CV response, with an equivalent oxide thickness correction ∼ 1.1nm to 1.5nm (Γ valley only) and ∼0.2 to 0.3 nm for the high-k/n-In0.53Ga0.47As/ InP and high-k/p-In0.53Ga0.47As/InP systems in accumulation respectively. The theoretical calculations are compared to experimental results for Al2O3/In0.53Ga 0.47As/InP MOS structures, and discrepancies are discussed.

Original languageEnglish
Title of host publicationPhysics and Technology of High-k Materials 8
PublisherElectrochemical Society Inc.
Pages433-444
Number of pages12
Edition3
ISBN (Electronic)9781607681724
ISBN (Print)9781566778220
DOIs
Publication statusPublished - 2010

Publication series

NameECS Transactions
Number3
Volume33
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

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