Abstract
Easy and quick to use process control tools have been developed to monitor the consistency of Scanning Acoustic Microcopy (SAM) equipment operation and to enable early detection of performance deterioration. Three key generic SAM equipment performance indicators are; resolution, beam symmetry and depth of focus. The means for monitoring these indicators are embodied in two new, simple to use tools, one for resolution and one for depth of focus plus beam symmetry. The operating frequency range appropriate to the use of SAM equipment for microelectronic component inspection is 15 MHz to 200 MHz, consequently the performance checking tools have been designed, made and validated to cover this range. As dependency on SAM has increased, particularly in the volume production environment, so has the need to ensure early detection of any degradation in equipment performance and thus satisfy ISO9000 requirements.
| Original language | English |
|---|---|
| Pages | 162-167 |
| Number of pages | 6 |
| Publication status | Published - 2005 |
| Event | 15th European Microelectronics and Packaging Conference and Exhibition, EMPC 2005 - Brugge, Belgium Duration: 12 Jun 2005 → 15 Jun 2005 |
Conference
| Conference | 15th European Microelectronics and Packaging Conference and Exhibition, EMPC 2005 |
|---|---|
| Country/Territory | Belgium |
| City | Brugge |
| Period | 12/06/05 → 15/06/05 |
Keywords
- Depth of focus
- Process control tools
- Resolution
- Scanning acoustic microscopy